diff options
Diffstat (limited to '3440/CH13')
| -rw-r--r-- | 3440/CH13/EX13.1/Ex13_1.sce | 7 | ||||
| -rw-r--r-- | 3440/CH13/EX13.2/Ex13_2.sce | 10 | ||||
| -rw-r--r-- | 3440/CH13/EX13.3/Ex13_3.sce | 11 |
3 files changed, 28 insertions, 0 deletions
diff --git a/3440/CH13/EX13.1/Ex13_1.sce b/3440/CH13/EX13.1/Ex13_1.sce new file mode 100644 index 000000000..ca6345586 --- /dev/null +++ b/3440/CH13/EX13.1/Ex13_1.sce @@ -0,0 +1,7 @@ +clc
+
+c=30//m/min
+t=1//minute
+w=300*10^-3//m
+V=c*%pi*(w/2)^2*t
+disp(V,"V in m^3 is= ")
diff --git a/3440/CH13/EX13.2/Ex13_2.sce b/3440/CH13/EX13.2/Ex13_2.sce new file mode 100644 index 000000000..ef31df68e --- /dev/null +++ b/3440/CH13/EX13.2/Ex13_2.sce @@ -0,0 +1,10 @@ +clc
+
+ET=90//mJ/cm^2
+EI=45//mJ/cm^2
+gammma=1/[log(ET/EI)]
+disp(gammma,"gamma is= ")
+ET=7//mJ/cm^2
+EI=12//mJ/cm^2
+gammma=1/[log(EI/ET)]
+disp(gammma,"gamma is= ")
diff --git a/3440/CH13/EX13.3/Ex13_3.sce b/3440/CH13/EX13.3/Ex13_3.sce new file mode 100644 index 000000000..f907ad9dd --- /dev/null +++ b/3440/CH13/EX13.3/Ex13_3.sce @@ -0,0 +1,11 @@ +clc
+
+c=750//nm/min
+l=812//nm/min
+r=765//nm/min
+t=743//nm/min
+b=798//nm/min
+Al=(c+l+r+t+b)/5
+disp(Al,"Al average etch rate in nm/min is= ")
+Er=[(l-t)/(l+t)]*100
+disp(Er,"Etch rate uniformly in % is= ")
|