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{
"metadata": {
"name": ""
},
"nbformat": 3,
"nbformat_minor": 0,
"worksheets": [
{
"cells": [
{
"cell_type": "heading",
"level": 1,
"metadata": {},
"source": [
"Chapter 12: Lithography and Etching"
]
},
{
"cell_type": "heading",
"level": 2,
"metadata": {},
"source": [
"Example 12.1 Page 406"
]
},
{
"cell_type": "code",
"collapsed": false,
"input": [
"#initialisation of variable\n",
"from math import *\n",
"l=.2;#mm\n",
"t=1;#time\n",
"F=30;#flow\n",
"p=350;#particles\n",
"\n",
"#calculation\n",
"V=F*pi*(l/2)**2*t;#volume\n",
"N=p*V;#number\n",
"\n",
"#result\n",
"print\"air volume in 1min in waafer\",round(V,3),\"m^3\"\n",
"print\"number of dust particles is\",round(N,0)"
],
"language": "python",
"metadata": {},
"outputs": [
{
"output_type": "stream",
"stream": "stdout",
"text": [
"air volume in 1min in waafer 0.942 m^3\n",
"number of dust particles is 330.0\n"
]
}
],
"prompt_number": 1
},
{
"cell_type": "heading",
"level": 2,
"metadata": {},
"source": [
"Example 12.2 Page 414"
]
},
{
"cell_type": "code",
"collapsed": false,
"input": [
"#initialisation of variable\n",
"from math import *\n",
"Et1=90;#mJ/cm^2\n",
"E11=45;#mJ/cm^2\n",
"Et2=7.0;#mJ/cm^2\n",
"E12=12.0;#mJ/cm^2\n",
"\n",
"#calculation\n",
"G1=(log(Et1/E11))**-1;#gamma1\n",
"G2=(log(E12/Et2))**-1;#gamma2\n",
"\n",
"#result\n",
"print\"for +ve resist gamma is\",round(G1,1)\n",
"print\"for -ve resist gamma is\",round(G2,1)"
],
"language": "python",
"metadata": {},
"outputs": [
{
"output_type": "stream",
"stream": "stdout",
"text": [
"for +ve resist gamma is 1.4\n",
"for -ve resist gamma is 1.9\n"
]
}
],
"prompt_number": 2
},
{
"cell_type": "heading",
"level": 2,
"metadata": {},
"source": [
"Example 12.3 Page 427"
]
},
{
"cell_type": "code",
"collapsed": false,
"input": [
"#initialisation of variable\n",
"from math import *\n",
"Ec=750.0;#centre\n",
"El=812.0;#left\n",
"Er=765.0;#right\n",
"Et=743.0;#top\n",
"Eb=798.0;#bottom\n",
"D=200.0;#diameter\n",
"\n",
"#calculation\n",
"A=(Ec+El+Er+Et+Eb)/5;#average\n",
"U=(El-Et)/(El+Et)*100;#uniformity\n",
"\n",
"#result\n",
"print\"average etch rate is\",round(A,1),\"nm/min\"\n",
"print\"etch rate uniformity is\",round(U,1),\"%\""
],
"language": "python",
"metadata": {},
"outputs": [
{
"output_type": "stream",
"stream": "stdout",
"text": [
"average etch rate is 773.6 nm/min\n",
"etch rate uniformity is 4.4 %\n"
]
}
],
"prompt_number": 3
},
{
"cell_type": "heading",
"level": 2,
"metadata": {},
"source": [
"Example 12.4 Page 433"
]
},
{
"cell_type": "code",
"collapsed": false,
"input": [
"#initialisation of variable\n",
"from math import *\n",
"Pr=200;#pressure\n",
"Ph=5;#pressure\n",
"Na=6.02*10**23;#avagadro no.\n",
"R=.082;#rydberg's constant\n",
"T=300;#K\n",
"E1=10**9;#electron density\n",
"E2=10**10;#electron density\n",
"E3=10**11;#electron density\n",
"E4=10**12;#electron density\n",
"\n",
"#calculation\n",
"#For RIE system\n",
"N1=Pr/(760000*R*T)*Na/1000;\n",
"Ie1=E1/N1;#efficiency\n",
"Ie2=E2/N1;#efficiency\n",
"#For HDP system\n",
"N2=Ph/(760000*R*T)*Na/1000;\n",
"Ie3=E3/N2;#efficiency\n",
"Ie4=E4/N2;#efficiency\n",
"\n",
"#result\n",
"print\"Ionization efficiency for RIE ranges from\",round(Ie1,9),\"to\",round(Ie2,8)\n",
"print\"Ionization efficiency for HDP ranges from\",round(Ie3,6),\"to\",round(Ie4,5)"
],
"language": "python",
"metadata": {},
"outputs": [
{
"output_type": "stream",
"stream": "stdout",
"text": [
"Ionization efficiency for RIE ranges from 1.55e-07 to 1.55e-06\n",
"Ionization efficiency for HDP ranges from 0.000621 to 0.00621\n"
]
}
],
"prompt_number": 4
}
],
"metadata": {}
}
]
}
|
